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Bulk Specialty Gas Solutions
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Bulk Specialty Gas Solutions

Typical specialty gases which are required in large quantities by the electronics industry are:

Ammonia, Chlorine, Hydrogen Chlorine, Nitrogen Trifluoride, Nitrous oxide, Silane, Tetrafluoromethane ...

High demand of specialty gases can be solved in a safe, economic and efficient way by supply systems using bundles, larger containers or trailers.


F
ull system solutions
 storage containers (bundles, vessels, trailers, ...)
 supply systems (regulators, valves, piping, transducers, ...)
 utilities (heating and purging systems, pneumatics, vacuum, power, ...)
 control units (weight, pressure, vacuum, temperature, flow, automatic operation, gas detection, alarms, statistics, ...)


Features and Benefits
 low cost of ownership
 greater process efficiency
 improved quality, reliability, safety
 full redundancy through back-up system
 PLC based controller for automatic operation
 detail engineering with regard to thermodynamics
 CE marking


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Product list Bulk Specialty Gas Solutions

Productgroup Product
Ammonia   Ammonia 3.8
 Ammonia 4.5
 Ammonia 5.0
 Ammonia 6.0
Chlorine   Chlorine 2.8
 Chlorine 4.0
 Chlorine 5.0
Hydrogen chloride   Hydrogen chloride 2.8
 Hydrogen chloride 4.5
 Hydrogen chloride 5.0
 Hydrogen chloride 5.5
Nitrogen trifluoride   Nitrogen trifluoride 4.0
Nitrous oxide   Nitrous oxide 2.5
 Nitrous oxide 4.5
 Nitrous oxide 5.0
Silane   Silane 4.0
 Silane 5.0
Tetrafluoromethane   Tetrafluoromethane 2.8 (R 14)
 Tetrafluoromethane 3.5 (R 14)
 Tetrafluoromethane 4.5 (R 14)
 Tetrafluoromethane 5.0 (R 14)





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