Bulk Specialty Gas SolutionsTypical specialty gases which are required in large quantities by the electronics industry are:
Ammonia, Chlorine, Hydrogen Chlorine, Nitrogen Trifluoride, Nitrous oxide, Silane, Tetrafluoromethane ...
High demand of specialty gases can be solved in a safe, economic and efficient way by supply systems using bundles, larger containers or trailers.
Full system solutions
storage containers (bundles, vessels, trailers, ...)
supply systems (regulators, valves, piping, transducers, ...)
utilities (heating and purging systems, pneumatics, vacuum, power, ...)
control units (weight, pressure, vacuum, temperature, flow, automatic operation, gas detection, alarms, statistics, ...)
Features and Benefits
low cost of ownership
greater process efficiency
improved quality, reliability, safety
full redundancy through back-up system
PLC based controller for automatic operation
detail engineering with regard to thermodynamics
CE marking
Contact Linde Nippon Sanso Product list Bulk Specialty Gas Solutions
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