Etching Gases & Solutions

Higher aspect ratios and shrinking device geometries place tight requirements on the etching procedures used in semiconductor manufacturing. The current and upcoming processes require advanced tailored etching molecules or more sophisticated gas combinations. Linde Nippon Sanso offers the complete range of etching and cleaning gases and related supply systems to the customers in the electronics industry.

Also, environmental aspects are becoming more important year by year. Together with our global partners we are constantly working to improve the efficiency of etching procedures, to develop new applications and to introduce new gases which are environmentally friendly.

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Productgroup		Product
Boron trichloride		Boron trichloride 2.8  Boron trichloride 4.0  Boron trichloride 5.0
Boron trifluoride		Boron trifluoride 1.6  Boron trifluoride 2.5
Chlordifluoromethane		Chlordifluoromethane 2.8 (R 22)
Chlorine		Chlorine 2.8  Chlorine 4.0  Chlorine 5.0
Difluoromethane		Difluoromethane 3.0 (R 32)
Fluoromethane		Fluoromethane 2.5 (R 41)
Hexafluorethane		Hexafluoroethane 2.8 (R 116)  Hexafluoroethane 3.5 (R 116)  Hexafluoroethane 5.0 (R 116)
Hydrogen bromide		Hydrogen bromide 2.8  Hydrogen bromide 4.5  Hydrogen bromide 5.0
Hydrogen chloride		Hydrogen chloride 2.8  Hydrogen chloride 4.5  Hydrogen chloride 5.0  Hydrogen chloride 5.5
Nitrogen trifluoride		Nitrogen trifluoride 4.0  Nitrogen trifluoride 4.5
Octafluorocyclobutane		Octafluorocyclobutane 4.8 (R C318)
Octafluoropropane		Octafluoropropane 3.5 (R 218)
Octafluorotetrahydrofurane		Octafluorotetrahydrofurane 2.5
Silicon tetrafluoride		Silicon tetrafluoride 4.8
Sulfur hexafluoride		Sulfur hexafluoride 3.0  Sulfur hexafluoride 4.5  Sulfur hexafluoride 4.8  Sulfur hexafluoride 5.0
Tetrafluoromethane		Tetrafluoromethane 2.8 (R 14)  Tetrafluoromethane 3.5 (R 14)  Tetrafluoromethane 4.5 (R 14)  Tetrafluoromethane 5.0 (R 14)
Trifluoromethane		Trifluoromethane 2.8 (R 23)  Trifluoromethane 3.5 (R 23)  Trifluoromethane 4.8 (R 23)  Trifluoromethane 5.0 (R 23)
Xenon		Xenon 4.0  Xenon 4.5  Xenon 5.0  Xenon 5.3 Halocarbon free