Lithography & Laser Systems

Not only semiconductor deposition processes but also the sophisticated optical components of lithography tools require the supply of gases and gas mixtures at highest levels of purity. Not to forget the laser systems which commonly also need specific gas mixtures for their operation.

Linde Nippon Sanso offers a whole range of purging gases and mixtures designed to meet our customers specific needs. Also in the field of laser mixtures we have a long-lasting track record of expert products and supply solutions.

Please refer to our product catalogue or:
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