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Silicon Germanium (SiGe)
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Silicon Germanium (SiGe)

Increasing device speed and mobility, achieving power and cost efficiency, fulfilling next generation scaling requirements. Silicon germanium (SiGe) and strained silicon (sSi) are key technologies for the challenging goals of the semiconductor roadmap.

Linde Nippon Sanso is your number-one partner for comprehensive gas solutions enabling your success in today's and tomorrow's state-of-the-art SiGe epitaxy. Our offering of course includes germane (GeH4) but also comprises sophisticated gas supply systems and solutions.


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Product list Silicon Germanium (SiGe)

Productgroup Product
Dichlorosilane   Dichlorosilane 2.0
 Dichlorosilane 3.0
Disilane   Disilane 4.8
German   Germane 5.0
Germane in Hydrogen   1-2 % Germane, Balance Hydrogen
Silane   Silane 4.0
 Silane 5.0
Silane in Nitrogen   1-2 % Silane, Balance Nitrogen
Silane in Helium   1-2 % Silane, Balance Helium
Silane in Hydrogen   1-2 % Silane, Balance Hydrogen





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