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Electronic Gases (ESG)

Our online offering of electronic gases fulfilling the highest purity and quality demands of semiconductor applications.
(Please note that all information given is in accordance with the legal requirements for Germany. They might be slightly different for your country.)

Further options:
Electronic Pure Gases Electronic Gas Mixtures


Related Electronic Gases information:
ESG Production
ESG Cylinder Specification & Preparation
ESG Filling
Quality
Material Safety Data Sheets (MSDS)

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Product Information
 Arsine AsH3 optoelectronic grade (PDF, 41kB)
 Phosphine PH3 optoelectronic grade (PDF, 40kB)
 Tungsten Hexafluoride WF6 (PDF, 53kB)

Product list Electronic Gases

Productgroup Product
Ammonia   Ammonia 3.8
 Ammonia 4.5
 Ammonia 5.0
 Ammonia 6.0
 Ammonia 6.0 Opto
Arsine in Hydrogen   15 % Arsine, Balance Hydrogen
Arsine   Arsine 5.0
Boron trichloride   Boron trichloride 2.8
 Boron trichloride 4.0
 Boron trichloride 5.0
Boron trifluoride   Boron trifluoride 1.6
 Boron trifluoride 2.5
Carbon monoxide   Carbon monoxide 2.0
 Carbon monoxide 3.0
 Carbon monoxide 3.7
 Carbon monoxide 4.7
Chlorine   Chlorine 2.8
 Chlorine 4.0
 Chlorine 5.0
Dichlorosilane   Dichlorosilane 2.0
 Dichlorosilane 3.0
Disilane   Disilane 4.8
Fluoromethane   Fluoromethane 2.5 (R 41)
German   Germane 5.0
Germane in Hydrogen   1-2 % Germane, Balance Hydrogen
Hexafluorethane   Hexafluoroethane 2.8 (R 116)
 Hexafluoroethane 3.5 (R 116)
 Hexafluoroethane 5.0 (R 116)
Hydrogen bromide   Hydrogen bromide 2.8
 Hydrogen bromide 4.5
 Hydrogen bromide 5.0
Hydrogen chloride   Hydrogen chloride 2.8
 Hydrogen chloride 4.5
 Hydrogen chloride 5.0
 Hydrogen chloride 5.5
Krypton   ISOKRYPT
 Krypton 4.0
 Krypton 4.5
 Krypton 5.0
 Krypton 5.3 Halocarbon free
Nitric oxide   Nitric oxide 2.5
Nitrogen trifluoride   Nitrogen trifluoride 4.0
 Nitrogen trifluoride 4.5
Nitrous oxide   Nitrous oxide 2.5
 Nitrous oxide 4.5
 Nitrous oxide 5.0
Octafluorocyclobutane   Octafluorocyclobutane 4.8 (R C318)
Octafluoropropane   Octafluoropropane 3.5 (R 218)
Octafluorotetrahydrofurane   Octafluorotetrahydrofurane 2.5
Phosphine in Hydrogen   15 % Phosphine, Balance Hydrogen
 20-100 ppm Phosphine, Balance Hydrogen
Phosphine in Nitrogen   0,4 ppm Phosphine, Balance Nitrogen
Phosphine   Phosphine 5.0
R 125   R 125
(Pentafluoroethane)

Oxygen in Tetrafluoromethane   4-15 % Oxygen, Balance Tetrafluoromethane 3.5
Silane in Hydrogen   1-2 % Silane, Balance Hydrogen
Silane in Helium   1-2 % Silane, Balance Helium
Silane in Nitrogen   1-2 % Silane, Balance Nitrogen
Silane   Silane 4.0
 Silane 5.0
Silicon tetrafluoride   Silicon tetrafluoride 4.8
Sulfur hexafluoride   Sulfur hexafluoride 3.0
 Sulfur hexafluoride 4.5
 Sulfur hexafluoride 4.8
 Sulfur hexafluoride 5.0
Tetrafluoromethane   Tetrafluoromethane 2.8 (R 14)
 Tetrafluoromethane 3.5 (R 14)
 Tetrafluoromethane 4.5 (R 14)
 Tetrafluoromethane 5.0 (R 14)
Trifluoromethane   Trifluoromethane 2.8 (R 23)
 Trifluoromethane 3.5 (R 23)
 Trifluoromethane 4.8 (R 23)
 Trifluoromethane 5.0 (R 23)
Xenon   Xenon 4.0
 Xenon 4.5
 Xenon 5.0
 Xenon 5.3 Halocarbon free





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