Implant Gas Solutions - SDS & VAC

As market leader for implant gases, we have a track record of supplying the safest gas package to the semiconductor industry. And there is a lot more to it than just gas: Our experts help you optimising your gas usage.

Linde Nippon Sanso can offer two product groups for safest implantation

SDS
SDS® - Safe Delivery Source - is the name of our product range for a safe and reliable supply with AsH₃, ¹¹BF₃, PH₃, GeH₄, SiF₄. Linde Nippon Sanso is your exclusive supplier for SDS® gases in Europe. Safe Delivery Source SDS® is regarded as a revolution in the semiconductor industry:
The only true subatmospheric implant gas package (no high pressure inside the cylinder)
No mechanical pressure reducing system involved

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VAC
These high pressure cylinders hav a two-fold internal pressure regulator. Only subatmospheric gas withdrawal is possible. A proven product for Boron Trifluoride.

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 VAC ¹¹BF₃ Product Data Sheet (PDF, 391kB)

Related information:

Material Safety Data Sheets (MSDS) for SDS & VAC

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SDS® and VAC® are registered trademarks of Mathson Tri-Gas and ATMI.