Boron trichloride 2.8
| Conversion factors Boron trichloride |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 3,65 | 4,913 | | 0,274 | 1 | 1,346 | | 0,204 | 0,743 | 1 |
| Identification Boron trichloride 2.8 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Boron trichloride 2.8
| Valve outlet:
| 1, DIN 477 No. 8
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| Applications Boron trichloride 2.8 | - dry etching of semiconductor materials and metals (e.g. plasma etching of Al, Si)
- doping of silicon and germanium per epitaxy, diffusion or ion implantation
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Mixtures of Boron trichloride with other gases in defined compositions.
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