Chlorine 5.0
| Impurities Chlorine 5.0, ppm: | | H2O |  | 1 | | O2 | | 1 | | N2 | | 2 | | CO | | 1 | | CO2 | | 5 | | HC | | 1 | | Fe | | 0,5* |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Chlorine |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 1,924 | 3,007 | | 0,52 | 1 | 1,563 | | 0,333 | 0,64 | 1 |
| Identification Chlorine 5.0 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Chlorine 5.0
| Valve outlet:
| 1, DIN 477 No. 8
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| Applications Chlorine 5.0 | - dry etching of semiconductor materials and metals (e.g. plasma etching of Al, Au, Si, GaAs)
- manufacturing of fibre optics
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Mixtures of Chlorine with other gases in defined compositions.
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