Nitrogen trifluoride 4.5
| | H2O |  | 0,5 | | O2 | | 3 | | N2 | | 3 | | CO2 | | 1 | | CF4 | | 20 | | N2O | | 1 | | SF6 | | 1 | | CO | | 0,5 | | HF | | 1 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Nitrogen trifluoride |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 1,922 | 2,96 | | 0,52 | 1 | 1,54 | | 0,338 | 0,649 | 1 |
| Identification Nitrogen trifluoride 4.5 | | Cylinder shoulder color: | Blue RAL 5010 | | Label: | Nitrogen trifluoride 4.5
| Valve outlet:
| 1, DIN 477 No. 8
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| Properties Nitrogen trifluoride |
| | | MAK value: | 10 ppm (TLV) | | Chemical symbol: | NF3 | | Molar mass: | 71.002 g/mol | | Critical temperature: | 233.89 K (-39.26 °C) | Boiling point
at 1,013 bar (Ts): | 144.15 K (-129 °C) | | Relative density at 15°C, 1 bar (dryair = 1): | 2.446 |
| Applications Nitrogen trifluoride 4.5 | - dry etching of semiconductor materials (e.g. plasma etching of silicon)
- cleaning of process reactors
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Mixtures of Nitrogen trifluoride with other gases in defined compositions.
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