Octafluorocyclobutane 4.8 (R C318)
| Impurities Octafluorocyclobutane 4.8 (R C318), ppm: | | H2O |  | 2 | | O2 + N2 | | 10 | | CO | | 1 | | CO2 | | 5 | | other hal. HC | | 5 | | Acid | | 1* |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Octafluorocyclobutane |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 5,42 | 8,87 | | 0,18 | 1 | 1,637 | | 0,11 | 0,61 | 1 |
| Identification Octafluorocyclobutane 4.8 (R C318) | | Cylinder shoulder color: | Bright Green RAL 6018 | | Label: | Octafluorocyclobutane 4.8
| Valve outlet:
| W 21.80 x 1/14, DIN 477 No. 6
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| Properties Octafluorocyclobutane | Under pressure liquified gas, suffocating
|  | | MAK value: | nicht festgelegt | | Chemical symbol: | C4F8 | | Molar mass: | 200.03 g/mol | | Critical temperature: | 388.47 K (115.32 °C) | Boiling point
at 1,013 bar (Ts): | 266.73 K (-6.42 °C) | | Relative density at 15°C, 1 bar (dryair = 1): | 7.330 |
| Applications Octafluorocyclobutane 4.8 (R C318) | | Dry etching of semiconductor materials (e.g. plasma etching of Si, SiO2). |
Mixtures of Octafluorocyclobutane with other gases in defined compositions.
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