Tetrafluoromethane 5.0 (R 14)
| Impurities Tetrafluoromethane 5.0 (R 14), ppm: | | H2O |  | 1 | | O2 + N2 | | 5 | | CO | | 1 | | CO2 | | 1 | | other hal. HC | | 5 | | Acid | | 0,1* |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Tetrafluoromethane |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 2,303 | 3,692 | | 0,434 | 1 | 1,603 | | 0,271 | 0,624 | 1 |
| Identification Tetrafluoromethane 5.0 (R 14) | | Cylinder shoulder color: | Bright Green RAL 6018 | | Label: | Tetrafluoromethane 5.0
| Valve outlet:
| W 21.80 x 1/14, DIN 477 No. 6
|
| Properties Tetrafluoromethane | Compressed gas, suffocating
|  | | MAK value: | nicht festgelegt | | Chemical symbol: | CF4 | | Molar mass: | 88.010 g/mol | | Critical temperature: | 227.7 K (-45.45 °C) | Boiling point
at 1,013 bar (Ts): | 145.21 K (-127.94 °C) | | Relative density at 15°C, 1 bar (dryair = 1): | 3.050 |
| Applications Tetrafluoromethane 5.0 (R 14) | - dry etching of semiconductor materials and metals (e.g. plasma etching of SiO2, Si3N4)
- photoresist stripping
- cleaning of drill holes
|
Mixtures of Tetrafluoromethane with other gases in defined compositions.
|
|  |
|
