Ammonia 5.0
| Impurities Ammonia 5.0, ppm: | | H2O |  | 1 | | O2 | | 1 | | N2 | | 4 | | CO | | 1 | | CO2 | | 1 | | HC | | 1 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Delivery forms: Ammonia 5.0 |
|
Capacity, liter |
Vapor pressure at 20°C, bar |
filling quantity, kg | | Delivery notes: | * upright drum, dimensions with skid
** horizontal drum, dimensions with skid |
| Conversion factors Ammonia |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 1,058 | 0,722 | | 0,945 | 1 | 0,682 | | 1,386 | 1,466 | 1 |
| Identification Ammonia 5.0 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Ammonia 5.0
| Valve outlet:
| W 21.80 x 1/14, DIN 477 No. 6
upright drum: DISS 720 pneumatic
|
| Applications Ammonia 5.0 | - deposition of Si3N4 per CVD in conjunction with silicon carrying gases
- manufacturing of GaN for blue light emitting diodes
|
Mixtures of Ammonia with other gases in defined compositions.
|
|  |
|
