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Silicon Germanium (SiGe)
Wafer manufacturing

1-2 % Silane, Balance Hydrogen

  

Components:

Silane (SiH4): 1-2%
rest: Hydrogen (H2)
Manufacturing tolerance (relative), analytical accuray (relative), stability (months)
  
  
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Delivery forms: 1-2 % Silane, Balance Hydrogen



Capacity, liter

filling pressure, approx. bar

filling quantity, m³
 
Steel cylinder 50 150 7,5

Identification 1-2 % Silane, Balance Hydrogen
Cylinder shoulder color: Red RAL 3000
Label: 1-2 % Silane, Balance Hydrogen
Valve outlet:
W 21.80 x 1/14 LH (DIN 477 No. 1)

Applications 1-2 % Silane, Balance Hydrogen
Deposition of silicon.



Gas mixtures and calibration gases in customer-specific compositions.



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