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Linde Nippon Sanso

Silicon Germanium (SiGe)

Ion Implantation

Lithography & Laser Systems

Optoelectronics & Compound Semiconductors

Photovoltaics & Solar Industry

R&D, high-k & low-k

Silicon Germanium (SiGe)

Wafer manufacturing

Silane 4.0


	Purity, %	> 99,99


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Impurities Silane 4.0, ppm:
H₂O		2
O₂		1
N₂		20
CO + CO₂		5
HC		5
Chlorsilane		2
H₂		200
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages)

Delivery forms: Silane 4.0
	Capacity, liter	filling pressure, approx. bar	filling quantity, kg
Steel cylinder	2	48	0,2
Steel cylinder	10	48	1
Steel cylinder	50	100	16
Steel cylinder	50	48	5

Conversion factors Silane

m³ gas (15 °C, 1 bar)	Litre liquid at T_s	kg
1	2,428	1,35
0,412	1	0,556
0,741	1,799	1

Identification Silane 4.0
Cylinder shoulder color:	Red RAL 3000
Label:	Silane 4.0
Valve outlet:	W 21.80 x 1/14 LH, DIN 477 No. 1

Properties Silane
Compressed gas, highly flammable, pyrophoric
MAK value:	5 ppm (TLV)
Chemical symbol:	SiH₄
Molar mass:	32.118 g/mol
Critical temperature:	269.65 K (-3.5 °C)
Boiling point at 1,013 bar (T_s):	161.75 K (-111.4 °C)
Relative density at 15°C, 1 bar (dryair = 1):

Applications Silane 4.0

deposition of crystalline silicon layers (epitaxy)
CVD of silicon oxide and silicon nitride layers
deposition of polycrystalline and amorphous silicon (CVD)

Other delivery forms Silane
Silane 5.0

Mixtures of Silane with other gases in defined compositions.

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