Hydrogen chloride 5.5
| Impurities Hydrogen chloride 5.5, ppm: | | H2O |  | 1 | | O2 | | 0,5 | | N2 | | 1 | | CO | | 0,5 | | CO2 | | 1 | | HC | | 0,5 | | Fe | | 0,1* |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Hydrogen chloride |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 1,29 | 1,536 | | 0,775 | 1 | 1,191 | | 0,651 | 0,84 | 1 |
| Identification Hydrogen chloride 5.5 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Hydrogen chloride 5.5
| Valve outlet:
| 1, DIN 477 No. 8
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| Applications Hydrogen chloride 5.5 | - dry etching of semiconductor materials (e.g. plasma etching of Al, GaAs)
- reactive gas at oxidation of silicon
- cleaning of reactors
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Mixtures of Hydrogen chloride with other gases in defined compositions, e.g. für excimer lasers.
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