Chlorine 4.0
| Impurities Chlorine 4.0, ppm: | | H2O |  | 1 | | O2 | | 5 | | N2 | | 40 | | CO | | 5 | | CO2 | | 50 | | HC | | 5 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Delivery forms: Chlorine 4.0 |
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Capacity, liter |
Vapor pressure at 20°C, bar |
filling quantity, kg | | Delivery notes: | * upright drum, dimensions with skid |
| Conversion factors Chlorine |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 1,924 | 3,007 | | 0,52 | 1 | 1,563 | | 0,333 | 0,64 | 1 |
| Identification Chlorine 4.0 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Chlorine 4.0
| Valve outlet:
| 1, DIN 477 No. 8
drum: DISS 728 pneumatic
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| Applications Chlorine 4.0 | - dry etching of semiconductor materials and metals (e.g. plasma etching of Al, Au, Si, GaAs)
- manufacturing of fibre optics
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Mixtures of Chlorine with other gases in defined compositions.
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