Silane 5.0
| Impurities Silane 5.0, ppm: | | H2O |  | 1 | | O2 | | 1 | | N2 | | 3 | | CO + CO2 | | 1 | | HC | | 0,5 | | Chlorsilane | | 0,5 | | H2 | | 50 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Silane |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 2,428 | 1,35 | | 0,412 | 1 | 0,556 | | 0,741 | 1,799 | 1 |
| Identification Silane 5.0 | | Cylinder shoulder color: | Red RAL 3000 | | Label: | Silane 5.0
| Valve outlet:
| W 21.80 x 1/14 LH, DIN 477 No. 1
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| Applications Silane 5.0 | - deposition of crystalline silicon layers (epitaxy)
- CVD of silicon oxide and silicon nitride layers
- deposition of polycrystalline and amorphous silicon (CVD)
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Mixtures of Silane with other gases in defined compositions.
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