Sulfur hexafluoride 4.5
| Impurities Sulfur hexafluoride 4.5, ppm: | | H2O |  | 5 | | O2 + N2 | | 10 | | CF4 | | 40 | | Acid* | | 0,5** |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Sulfur hexafluoride |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 3,234 | 6,176 | | 0,309 | 1 | 1,91 | | 0,162 | 0,524 | 1 |
| Identification Sulfur hexafluoride 4.5 | | Cylinder shoulder color: | Bright Green RAL 6018 | | Label: | Sulfur hexafluoride 4.5
| Valve outlet:
| W 21.80 x 1/14, DIN 477 No. 6
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| Properties Sulfur hexafluoride | Under pressure liquified gas, suffocating
|  | | MAK value: | 1000 ppm | | Chemical symbol: | SF6 | | Molar mass: | 146.05 g/mol | | Critical temperature: | 318.69 K (45.54 °C) | Boiling point
at 1,013 bar (Ts): | 209.35 K (-63.8 °C) | | Relative density at 15°C, 1 bar (dryair = 1): | 5.106 |
| Applications Sulfur hexafluoride 4.5 | - dry etching of semiconductor materials and metals (e.g. plasma etching of Si, SiO2)
- etching of Si before CVD deposition
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Mixtures of Sulfur hexafluoride with other gases in defined compositions.
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