Trifluoromethane 3.5 (R 23)
| Impurities Trifluoromethane 3.5 (R 23), ppm: | | H2O |  | 5 | | other hal. HC | | 100 | | Acid | | 1* | | O2 + N2 | | 400 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Trifluoromethane |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 2,049 | 2,949 | | 0,488 | 1 | 1,439 | | 0,339 | 0,695 | 1 |
| Identification Trifluoromethane 3.5 (R 23) | | Cylinder shoulder color: | Bright Green RAL 6018 | | Label: | Trifluoromethane 3.5
| Valve outlet:
| W 21.80 x 1/14, DIN 477 No. 6
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| Properties Trifluoromethane | Under pressure liquified gas, suffocating
|  | | MAK value: | nicht festgelegt | | Chemical symbol: | CHF3 | | Molar mass: | 70.010 g/mol | | Critical temperature: | 299.15 K (26 °C) | Boiling point
at 1,013 bar (Ts): | 190.97 K (-82.18 °C) | | Relative density at 15°C, 1 bar (dryair = 1): | 2.438 |
| Applications Trifluoromethane 3.5 (R 23) | | Dry etching of semiconductor materials and metals (e.g. plasma etching of SiO2, Si3N4). |
Mixtures of Trifluoromethane with other gases in defined compositions.
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