Arsine 5.0
| Impurities Arsine 5.0, ppm: | | O2 |  | 1 | | N2 | | 3 | | H2O | | 2 | | HC | | 1 | | CO | | 1 | | CO2 | | 1 | | PH3 | | 0,1 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Arsine |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 1,991 | 3,253 | | 0,502 | 1 | 1,634 | | 0,307 | 0,612 | 1 |
| Identification Arsine 5.0 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Arsine 5.0
| Valve outlet:
| W 21.80 x 1/14 LH, DIN 477 No. 1
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| Applications Arsine 5.0 | | Doping of silicon per epitaxy, diffusion oder ion implantation. For this purpose mixtures with H2, Ar, He or N2 are preferably used (dopant gas mixtures). |
Mixtures of Arsine with other gases in defined compositions.
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