Dichlorosilane 3.0
| Impurities Dichlorosilane 3.0, ppm: | | other chlorosilane |  | 0,1 %* | | C | | 1 ppm* | | Fe | | 25 ppb* | | B | | 0,1 ppb* | | P | | 0,2 ppb* | | As | | 0,3 ppb* |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Dichlorosilane |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 3,487 | 4,397 | | 0,287 | 1 | 1,261 | | 0,227 | 0,793 | 1 |
| Identification Dichlorosilane 3.0 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Dichlorosilane 3.0
| Valve outlet:
| 1 LH, DIN 477 No. 5
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| Applications Dichlorosilane 3.0 | | Silicon deposition in CVD processes (e.g. epitaxy). |
Mixtures of Dichlorosilane with other gases in defined compositions.
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