Fluoromethane 2.5 (R 41)
| Impurities Fluoromethane 2.5 (R 41), ppm: | | H2O |  | 100 | | O2 | | 1200 | | N2 | | 3600 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Fluoromethane |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 1,788 | 1,445 | | 0,559 | 1 | 0,808 | | 0,692 | 1,238 | 1 |
| Identification Fluoromethane 2.5 (R 41) | | Cylinder shoulder color: | Red RAL 3000 | | Label: | Fluoromethane 2.5
| Valve outlet:
| W 21.80 x 1/14 LH, DIN 477 No. 1
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| Properties Fluoromethane | Under pressure liquified gas, highly flammable
|   | | MAK value: | nicht festgelegt | | Chemical symbol: | CH3F | | Molar mass: | 34.033 g/mol | | Critical temperature: | 317.7 K (44.55 °C) | Boiling point
at 1,013 bar (Ts): | 194.74 K (-78.41 °C) | | Relative density at 15°C, 1 bar (dryair = 1): | 1.190 |
| Applications Fluoromethane 2.5 (R 41) | | Dry etching of silicon with an high aspect ratio. |
Mixtures of Fluoromethane with other gases in defined compositions.
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