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Octafluorotetrahydrofurane 2.5

  

Purity, %

> 99,5
  
  
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Impurities Octafluorotetrahydrofurane 2.5, ppm:
H2O10*
Acid0,1*
O2+N2+CO+CO2400


The percentages indicated in conjuction with purities are mole percents (ideal volume percentages)


Delivery forms: Octafluorotetrahydrofurane 2.5



Capacity, liter

Vapor pressure at 20°C, bar

filling quantity, kg
 
Steel cylinder 2 2,12 2
Steel cylinder 10 2,12 10
Steel cylinder 50 2,12 50

Delivery notes:

* mass fractions


Conversion factors Octafluorotetrahydrofurane
m³ gas
(15 °C, 1 bar)
Litre
liquid at Ts
kg
16,0149,79
0,16611,628
0,1020,6141



Identification Octafluorotetrahydrofurane 2.5
Cylinder shoulder color: Bright Green RAL 6018
Label: Octafluorotetrahydrofurane 2.5
Valve outlet:
W 21.80 x 1/14, DIN 477 No. 6


Properties Octafluorotetrahydrofurane
Under pressure liquified gas, suffocating

  
MAK value:nicht festgelegt
Chemical symbol:C4F8O
Molar mass:

216.00 g/mol

Critical temperature:399.96 K (127 °C)
Boiling point
at 1,013 bar (Ts):
274 K (0.8 °C)
Relative density at 15°C, 1 bar (dryair = 1): 8.090

Applications Octafluorotetrahydrofurane 2.5
Cleaning of CVD chambers.



Mixtures of Octafluorotetrahydrofurane with other gases in defined compositions.



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