Ammonia 6.0 Opto
| Impurities Ammonia 6.0 Opto, ppm: | | H2O |  | 0,05 | | O2 |  | 0,05 | | N2 |  | 0,5 | | CO |  | 0,05 | | CO2 |  | 0,05 | | HC |  | 0,1 | | Fe |  | 0,1* |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Ammonia |
m³ gas (15 °C, 1 bar) | Litre liquid at Ts | kg | | 1 | 1,058 | 0,722 | | 0,945 | 1 | 0,682 | | 1,386 | 1,466 | 1 |
| Identification Ammonia 6.0 Opto | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Ammonia 6.0 Opto
| Valve outlet:
| W 21.80 x 1/14, DIN 477 No. 6 DISS 720
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| Applications Ammonia 6.0 Opto | - deposition of Si3N4 per CVD in conjunction with silicon carrying gases
- manufacturing of GaN for blue light emitting diodes
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Mixtures of Ammonia with other gases in defined compositions.
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