Boron trichloride 5.0
| Impurities Boron trichloride 5.0, ppm: | | O2 |  | 1 | | N2 | | 2 | | CO | | 1 | | CO2 | | 5 | | HC | | 1 | | Fe | | 0,2* |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Boron trichloride |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 3,65 | 4,913 | | 0,274 | 1 | 1,346 | | 0,204 | 0,743 | 1 |
| Identification Boron trichloride 5.0 | | Cylinder shoulder color: | Yellow RAL 1018 | | Label: | Boron trichloride 5.0
| Valve outlet:
| 1, DIN 477 No. 8
|
| Applications Boron trichloride 5.0 | - dry etching of semiconductor materials and metals (e.g. plasma etching of Al, Si)
- doping of silicon and germanium per epitaxy, diffusion or ion implantation
|
Mixtures of Boron trichloride with other gases in defined compositions.
|
|  |
|
