Disilane 4.8
| Impurities Disilane 4.8, ppm: | | H2O |  | 1 | | O2 | | 1 | | N2 | | 4 | | Chlorsilane | | 0,2 | | CO2 | | 1 | | HC | | 1 |
The percentages indicated in conjuction with purities are mole percents (ideal volume percentages) |
| Conversion factors Disilane |
m³ gas
(15 °C, 1 bar) | Litre
liquid at Ts | kg | | 1 | 2,957 | 2,664 | | 0,338 | 1 | 0,901 | | 0,375 | 1,11 | 1 |
| Identification Disilane 4.8 | | Cylinder shoulder color: | Red RAL 3000 | | Label: | Disilane 4.8
| Valve outlet:
| W 21.80 x 1/14 LH, DIN 477 No. 1
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| Applications Disilane 4.8 | - deposition of crystalline silicon layers (epitaxy)
- low-temperature CVD
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Mixtures of Disilane with other gases in defined compositions.
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