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Electronic Pure Gases
Electronic Gas Mixtures
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Cylinder Specifications & Preparation
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Germane 5.0

  

Purity, %

> 99.999
  
  
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Impurities Germane 5.0, ppm:
N22
O2 + Ar0,5
CO1
CO22
CH41
H2O1
H250
Ge2H620
Ge3H81


The percentages indicated in conjuction with purities are mole percents (ideal volume percentages)


Delivery forms: Germane 5.0



Capacity, liter

filling pressure, approx. bar

filling quantity, kg
 
Aluminium cylinder 2 6 0,04
Aluminium cylinder 10 6 0,2
Steel cylinder 50 6 1


Conversion factors German
m³ gas
(15 °C, 1 bar)
Litre
liquid at Ts
kg
10,2480,337
0,45811,36
0,3370,7351



Identification Germane 5.0
Cylinder shoulder color: Yellow RAL 1018
Label: Germane 5.0
Valve outlet:
W 21,80 x 1/14 LH, DIN 477 No. 1


Properties German
Compressed gas, highly flammable, highly toxic, pyrophoric

 highly highly  
MAK value:0,2 ppm (TLV)
Chemical symbol:GeH4
Molar mass:

76,62 g/mol

Critical temperature:307,95 K (34,8 °C)
Boiling point
at 1,013 bar (Ts):
184,65 K (-88,5 °C)
Relative density at 15°C, 1 bar (dryair = 1): 2,6

Applications Germane 5.0
Separation of Si-Ge-layer in the microelectronics or for solar cells.



Germane Mixtures with balance gases Hydrogen, Argon, Helium or Nitrogen are delivered upon request at the same Germane impurity level.



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