Nanochem® Point-of-use Purifiers

Nanochem® purifiers have been leading in state-of-the-art gas purification technologies for the semiconductor industry since the early 1980?s. Integrating Nanochem® purifiers into your gas delivery system can provide process consistency, increased yields, longer equipment lifetimes and improved overall equipment efficiency.

Nanochem® purifiers are available for more than 30 different gases. The flow rate range is 1 ? 1000 slpm (standard liter per minute).

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 Nanochem® General Information (PDF 472 kB)
 Nanochem® L-Series® UHP Purifiers (PDF 118 kB)
 Nanochem® Metal-X? Corrosive Gas Purifiers (PDF 171 kB)
 Nanochem® OMX-Plus? Inert and Flammable Gas Purifiers (PDF 121 kB)
 Nanochem® End-Point-Detector (PDF 109 kB)

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Nanochem® is a registered trademark of Mathson Tri-Gas.